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Olympus OLS5100 Laser Confocal Microscopes

Built for failure analysis and material engineering research, the OLS5100 laser microscope combines exceptional measurement accuracy and optical performance with smart tools that make the microscope easy to use. Precisely measure shape and surface roughness at the submicron level quickly and efficiently to simplify your workflow with data you can trust.

Phone：+86-21-54286005

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OLS5100_Brochure_CN

OLS5100_Brochure_EN

Overview Specifications Dimensions

LEXT™ OLS5100 3D Laser Scanning Microscope

Laser Microscope for Material Analysis

LEXT™ OLS5100 3D激光扫描显微镜

Smart Workflow, Faster Experiments

Easier Material Engineering and Failure Analysis Experiments

The Smart Experiment Manager makes your submicron 3D observation and failure analysis experiment workflows simpler by automating previously time-consuming tasks.

Automatically creates your experiment plan
Autopopulates data to your experiment plan matrix, reducing the chance of input errors
Clear data trend visualization tools

Guaranteed Measurement Accuracy

LEXT microscope objectives deliver highly accurate measurement data. Paired with the Smart Lens Advisor, you can acquire accurate data you can be confident in.

Guaranteed measurement accuracy^*
Renowned Olympus optics reduce aberration to capture the correct shape of your sample throughout the entire field of view
Smart Lens Advisor helps you choose the right objective lens for your roughness measurement

^*The information, including guaranteed accuracy, on this web page is based on conditions set by Olympus.

LEXT microscope objectives

Easy Laser Scanning Microscopy

Using the microscope is easy for novice and experienced users thanks to thoughtfully designed software.

Acquire accurate data easily—put your sample on the stage and press the start button
Measurement performance guarantee tailored to your operating environment

Service and Support You Can Trust

From calibration to training, we offer a broad portfolio of services to help you maintain optimal device performance. Evident service contracts are:

Straightforward—so you can focus on the core of your business
Efficient—we can schedule preventative maintenance, including calibrations, on your behalf
Cost-effective—providing you savings throughout the life of the contract

Service and Support You Can Trust

Simple Material Engineering and Failure Analysis Experiment Management

Managing experiment conditions when testing new materials is complicated, so the OLS5100 laser microscope’s Smart Experiment Manager simplifies the process by automating key steps, such as creating the experiment plan.

Complete your measurement tasks up to 30% faster^*
Scan plan is autopopulated with data as it’s acquired
Don’t waste time transcribing data—the software does it for you

*Compared with OLS5000

Simple Material Engineering and Failure Analysis Experiment Management

Automatic Data Input

The software automatically adds values to your experiment plan matrix to minimize the chance of input errors. In just a couple of clicks, you can export your data to an Excel spreadsheet.

Easy Experiment Condition Data Organization

You can click on each cell in the experiment plan, and the software will automatically generate a file name that contains the evaluation conditions for easy record keeping. Each file contains the associated images and data.

Comprehensive Data Capture

The microscope scans your sample according to the experiment plan generated by the software so you know you’re not missing data or redoing work.

Find Data Problems Easily

A color map helps you understand your experiment data and verify that no data are missing and there are no errors. If there’s a problem, you can find and fix it earlier in the process.

Choose the Right Objective Lens

The Smart Lens Advisor helps you choose the right objective lens for your surface roughness measurement application. Enter some basic information—such as the field of view and the lens you want to use—and the Advisor will tell you how suitable it is for the application.

Easy Data Acquisition

Experienced and novice users alike can acquire data quickly and easily with the Smart Scan II feature. Place the sample on the stage, press the start button, and the microscope does the rest.

Easy Data Acquisition

Main unit

Model		OLS5100-SAF	OLS5100-SMF	OLS5100-LAF	OLS5100-EAF
Total magnification		54x–17,280x
Field of view		16 µm–5,120 µm
Measurement principle	Optical system	Reflection-type confocal laser scanning laser microscope Reflection-type confocal laser scanning laser-DIC microscope Color Color-DIC
	Light receiving element	Laser: Photomultiplier (2 channels) Color: CMOS color camera
Height measurement	Display resolution	0.5 nm
	Dynamic range	16 bits
	Repeatability σ_n-1^{1 2 *5}	5X: 0.45 μm, 10X: 0.1 μm, 20X: 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm
	Accuracy ^{1 3 *5}	0.15+L/100 μm (L:Measuring length[μm])
	Accuracy for stitched image ^{1 3 *5}	10X: 5.0+L/100 μm, 20X or higher: 1.0+L/100 μm (L: Stitching length [μm])
	Measurement noise (Sq noise) ^{1 4 *5}	1 nm (Type)
Width measurement	Display resolution	1 nm
	Repeatability 3σ_n-1 ^{1 2 *5}	5X: 0.4 μm, 10X: 0.2 μm, 20X: 0.05 μm, 50X: 0.04 μm, 100X: 0.02 μm
	Accuracy ^{1 3 *5}	Measurement value +/- 1.5%
	Accuracy for stitched image ^{1 3 *5}	10X: 24+0.5L μm, 20X: 15+0.5L μm, 50X: 9+0.5L μm, 100X: 7+0.5L μm (L: Stitching length [mm])
Maximum number of measuring points in a single measurement		4096 × 4096 pixels
Maximum number of measuring points		36-megapixels
XY stage configuration	Length measurement module	•	NA	NA	•
	Operating range	100 × 100 mm (3.9 × 3.9 in.) Motorized	100 × 100 mm (3.9 × 3.9 in.) Manual	300 × 300 mm (11.8 × 11.8 in.) Motorized	100 × 100 mm (3.9 × 3.9 in.) Motorized
Maximum sample height		100 × 100 mm (3.9 × 3.9 in.)	30 mm (1.2 in.)	30 mm (1.2 in.)	210 mm (8.3 in.)
Laser light source	Wavelength	405 nm
	Maximum output	0.95 mW
	Laser class	Class 2 (IEC60825-1:2007, IEC60825-1:2014)
Color light source		White LED
Electrical power		240 W	240 W	278 W	240 W
Mass	Microscope body	Approx. 31 kg (68.3 lb)	Approx. 32 kg (70.5 lb)	Approx. 50 kg (110.2 lb)	Approx. 43 kg (94.8 lb)
	Control box	Approx. 12 kg (26.5 lb)

*1 Guaranteed when used in constant temperature and constant-temperature environment (temperature: 20˚C±1˚C, humidity: 50%±10%) specified in ISO554(1976), JIS Z-8703(1983).
*2 For 20x or higher, when measured with MPLAPON LEXT series objectives.
*3 When measured with dedicated LEXT objective.
*4 Typical value when measured with MPLAPON100XLEXT objective, and may differ from the guaranteed value.
*5 Guaranteed under Olympus Certificate System.

** The OS license of Window 10 has been certified for the microscope controller provided by olympus. Therefore, Microsoft's license terms are applied and you agree to the terms.Please refer to the following for Microsoft license terms.
https://www.microsoft.com/en-us/Useterms/Retail/Windows/10/UseTerms_Retail_Windows_10_english.htm

Objectives

Series	Model	Numerical Aperture (NA)	Working Distance (WD) (mm)
UIS2 objective lens	MPLFLN2.5x	0.08	10.7
UIS2 objective lens	MPLFLN5x	0.15	20
Dedicated LEXT objective lens (10X)	MPLFLN10xLEXT	0.3	10.4
Dedicated LEXT objective lens (high-performance type)	MPLAPON20xLEXT	0.6	1
	MPLAPON50xLEXT	0.95	0.35
	MPLAPON100xLEXT	0.95	0.35
Dedicated LEXT objective lens (long working distance type)	LMPLFLN20xLEXT	0.45	6.5
	LMPLFLN50xLEXT	0.6	5.2
	LMPLFLN100xLEXT	0.8	3.4
Super long working distance lens	SLMPLN20x	0.25	25
	SLMPLN50x	0.35	18
	SLMPLN100x	0.6	7.6
Long working distance for LCD lens	LCPLFLN20xLCD	0.45	8.3-7.4
	LCPLFLN50xLCD	0.7	3.0-2.2
	LCPLFLN100xLCD	0.85	1.2-0.9

Application software

Standard software	OLS51-BSW
	Data acquisition app	Analysis app (simple analysis)
Motorized stage package application*1	OLS50-S-MSP
Advanced analysis application*2	OLS50-S-AA
Film thickness measurement application	OLS50-S-FT
Auto edge measurement application	OLS50-S-ED
Particle analysis application	OLS50-S-PA
Experimental total assist application	OLS51-S-ETA
Sphere/cylinder surface angle analysis application	OLS50-S-SA

*1 Including auto-stitching data acquisition and multi-area data acquisition functions.
*2 Including Profile analysis, Difference analysis, Step-height analysis, Surface analysis, Area/volume analysis, Line roughness analysis, Area roughness analysis and Histogram analysis.

Olympus Laser Microscopes

OLS5000-SAF Setup Example

OLS5100-SAF Setup Example

OLS5100-SAF 100 mm motorized stage Max. height of sample: 100 mm (3.9 in.)
OLS5100-EAF 100 mm motorized stage Max. height of sample: 210 mm (8.3 in.)
OLS5100-SMF 100 mm motorized stage Max. height of sample: 40 mm (1.6 in.)
OLS5100-LAF 300 mm motorized stage Max. height of sample: 37 mm (1.5 in.)